Single-Sheet Ion Beam Milling Device 'IML Series'
Introducing a sheet-type ion milling device capable of controlling high and low rate etching.
The "IML Series" is a sheet-type ion beam milling device that processes from cassette to cassette. It allows for high-rate etching and low-rate control. Additionally, devices with two processing chambers are also available. We offer free initial sample processing tailored to your application. For inquiries regarding wafer sizes, processing quantities, and more, please contact us. 【Features】 ■ High-rate etching and low-rate control are possible ■ Filamentless μ-wave neutralizer (optional) ■ EPD (endpoint detector) installation (optional) ■ Reactive gas compatibility (optional) ■ Filamentless RF bucket-type ion source (optional) *For more details, please refer to the PDF materials or feel free to contact us.
- Company：日立ハイテク
- Price：Other
